ANNLab Training

Virtual Semiconductor Cleanroom Resources

ANNLab develops open, browser-based training resources that let students, researchers, and trainees explore semiconductor fabrication before, or without, entering a physical cleanroom. Every resource below runs in a standard web browser, requires no installation, and is free to use.

The cleanroom VR tour, interactive map, interactive video, and video series were developed under the SMILE project, in close collaboration with Prof. Mehmet Belviranli’s team at the Colorado School of Mines, with support from the Microelectronics Commons Southwest Advanced Prototyping (SWAP) Hub.

6. Semiconductor Processing Laboratory Online Modules

A comprehensive 14-module journey from silicon crystal structure to advanced IC packaging, featuring interactive lab simulations, animated process visualizations, 51 self-assessment quiz questions, downloadable lecture notes, and a completion certificate. Created by Prof. Zafer Mutlu.

5. Digital Twin Photolithography Training

Explore photolithography through an interactive digital twin that replicates key steps of the semiconductor patterning process. Users virtually perform critical stages such as resist coating, exposure, development, and pattern transfer, while observing how process parameters influence final feature quality. The simulation bridges theoretical concepts with practical process behavior in a controlled virtual environment, and is particularly suited to students, researchers, and trainees building foundational and applied knowledge in semiconductor fabrication. Created by Prof. Zafer Mutlu.

4. Cleanroom Virtual Reality (VR) Tour

Experience the University of Arizona’s cleanroom through an immersive virtual reality tour. Users can virtually explore the cleanroom environment, interact with key equipment areas, and gain a deeper understanding of cleanroom workflows and semiconductor fabrication processes.

3. Cleanroom Interactive Map

Navigate the University of Arizona’s cleanroom through an interactive, Google Maps–style experience that locates each tool and bay within the facility.

2. Cleanroom Interactive Video

Explore the University of Arizona cleanroom through an interactive video module that allows viewers to pause, click, and learn about key tools, processes, and workflows in semiconductor fabrication.

1. Cleanroom Videos

Educational videos produced by ANNLab, covering semiconductor processing topics such as spin coating, lithography, atomic layer deposition, and metrology.