Training
Virtual Semiconductor Cleanroom Resources
The ANNLab develops open, browser-based training resources that let students, researchers, and trainees explore semiconductor fabrication before, or without, entering a physical cleanroom. Every resource below runs in a standard web browser, requires no installation, and is free to use.
Courses and Simulations
Online Course
Semiconductor Processing Laboratory Online Modules
A comprehensive 14-module journey from silicon crystal structure to advanced IC packaging, featuring interactive lab simulations, animated process visualizations, 51 self-assessment quiz questions, downloadable lecture notes, and a completion certificate. Created by Prof. Zafer Mutlu.
Digital Twin
Digital Twin Photolithography Training
Explore photolithography through an interactive digital twin of the semiconductor patterning process. Users virtually perform resist coating, exposure, development, and pattern transfer while observing how process parameters affect final feature quality. Created by Prof. Zafer Mutlu.
Virtual Cleanroom Tours and Videos
The cleanroom VR tour, interactive map, interactive video, and video series were developed under the SMILE project, in close collaboration with Prof. Mehmet Belviranli’s team at the Colorado School of Mines, with support from the Microelectronics Commons Southwest Advanced Prototyping (SWAP) Hub.
VR Tour
Cleanroom Virtual Reality (VR) Tour
Experience the University of Arizona’s cleanroom through an immersive virtual reality tour. Users can virtually explore the cleanroom environment, interact with key equipment areas, and gain a deeper understanding of cleanroom workflows and semiconductor fabrication processes.
Interactive Map
Cleanroom Interactive Map
Navigate the University of Arizona’s cleanroom through an interactive, Google Maps–style experience that locates each tool and bay within the facility.
Interactive Video
Cleanroom Interactive Video
Explore the University of Arizona’s cleanroom through an interactive video module that allows viewers to pause, click, and learn about key tools, processes, and workflows in semiconductor fabrication.
Video Series
Cleanroom Videos
Educational videos produced by our lab, covering core semiconductor processing techniques: photolithography, spin coating, ellipsometry, e-beam deposition, and atomic layer deposition.
Research Publications People Join